[发明专利]离子源数字PID控制参数自整定系统及方法有效
申请号: | 201410453377.2 | 申请日: | 2014-09-05 |
公开(公告)号: | CN104332375A | 公开(公告)日: | 2015-02-04 |
发明(设计)人: | 石文夫;谭红建;张政彬 | 申请(专利权)人: | 西安奥华电子仪器有限责任公司 |
主分类号: | H01J27/02 | 分类号: | H01J27/02 |
代理公司: | 西安智邦专利商标代理有限公司 61211 | 代理人: | 王少文 |
地址: | 710061 陕西省西*** | 国省代码: | 陕西;61 |
权利要求书: | 查看更多 | 说明书: | 查看更多 |
摘要: | |||
搜索关键词: | 离子源 数字 pid 控制 参数 系统 方法 | ||
1.一种离子源数字PID控制参数自整定系统,其特征在于:包括阳极电流测量模块、阳极高压脉冲产生模块、热丝电流控制模块、热丝电流测量模块、MCU主控模块以及上位机;
所述阳极电流测量模块、阳极高压脉冲产生模块、热丝电流控制模块、热丝电流测量模块分别于MCU主控模块连接;
所述阳极电流测量模块由阳极电流测量电路组成,用于测试阳极电流;
所述阳极高压脉冲产生模块由高压电源和阳极开关电路组成,用以产生离子源电离时所需的高压脉冲;
所述热丝电流控制模块由恒流源控制电路组成,用于产生离子源电离时所需要的热丝电流;
所述热丝电流测量模块由热丝测量电路组成,用于测量热丝电流的大小;
所述MCU主控模块用于接收上位机命令控制离子源电离;
所述上位机由微型机和地面箱体组成,用于发送命令给MCU主控模块控制离子源系统进行电离。
2.根据权利要求1所述的离子源数字PID控制参数自整定系统,其特征在于:
所述MCU主控模块由MCU、ADC电路、DAC电路和串口通讯组成,用于接收上位机命令控制离子源电离;所述MCU包括依次连接的平滑滤波单元、电流比较单元、模糊控制单元和数字PID控制单元;所述平滑滤波单元的输入端接阳极电流测量模块的输出端,所述数字PID控制单元的输出端接热丝电流控制模块的输入端。
3.一种离子源数字PID控制参数自整定方法,其特征在于:包括以下步骤:
1)上位机设定阳极电流,发送电离启动命令;
2)MCU通过串口通讯接收上位机的命令,阳极高压脉冲产生模块产生离子源电离时所需的高压脉冲,热丝电流控制模块产生离子源电离时所需要的热丝电流;
3)阳极电流测量电路对阳极电流进行采集,然后对采集数据进行平滑滤波并与设定的阳极电流进行比较,根据阳极电流变化的趋势和快慢确定数字PID控制待整定参数比例因子Kp、积分时间因子Ki、微分时间因子Kd,
4)将待整定参数Kp,Ki,Kd送入PID调节器,根据计算结果控制热丝电流的增减来达到离子源控制系统的平衡。
4.根据权利要求3所述的离子源数字PID控制参数自整定方法,其特征在于:
所述步骤3)中待整定参数Kp,Ki,Kd通过以下方式确定:
3.1)生成49条模糊规则:
1.If(E is NB)and(EC is NB)then(kp is PB)(ki is NB)(kd is PM)
2.If(E is NB)and(EC is NM)then(kp is PB)(ki is NB)(kd is PM)
3.If(E is NB)and(EC is NS)then(kp is PM)(ki is NM)(kd is PS)
4.If(E is NB)and(EC is Z)then(kp is PM)(ki is NS)(kd is NB)
5.If(E is NB)and(EC is PS)then(kp is PS)(ki is PS)(kd is NM)
6.If(E is NB)and(EC is PM)then(kp is ZO)(ki is ZO)(kd is NS)
7.If(E is NB)and(EC is PB)then(kp is ZO)(ki is ZO)(kd is NS)
8.If(E is NM)and(EC is NB)then(kp is PB)(ki is NB)(kd is PM)
9.If(E is NM)and(EC is NM)then(kp is PM)(ki is NM)(kd is PM)
10.If(E is NM)and(EC is NS)then(kp is PS)(ki is NS)(kd is PS)
11.If(E is NM)and(EC is Z)then(kp is NS)(ki is NS)(kd is NB)
12.If(E is NM)and(EC is PS)then(kp is NM)(ki is PS)(kd is NM)
13.If(E is NM)and(EC is PM)then(kp is ZO)(ki is ZO)(kd is NM)
14.If(E is NM)and(EC is PB)then(kp is ZO)(ki is ZO)(kd is NS)
15.If(E is NS)and(EC is NB)then(kp is PM)(ki is NM)(kd is ZO)
16.If(E is NS)and(EC is NM)then(kp is PS)(ki is NS)(kd is PS)
17.If(E is NS)and(EC is NS)then(kp is NS)(ki is NS)(kd is NS)
18.If(E is NS)and(EC is Z)then(kp is NM)(ki is PS)(kd is NM)
19.If(E is NS)and(EC is PS)then(kp is ZO)(ki is ZO)(kd is NS)
20.If(E is NS)and(EC is PM)then(kp is NS)(ki is PS)(kd is NS)
21.If(E is NS)and(EC is PB)then(kp is NS)(ki is PS)(kd is ZO)
22.If(E is ZO)and(EC is NB)then(kp is PS)(ki is NS)(kd is ZO)
23.If(E is ZO)and(EC is NM)then(kp is NS)(ki is NS)(kd is NS)
24.If(E is ZO)and(EC is NS)then(kp is NM)(ki is NM)(kd is NS)
25.If(E is ZO)and(EC is ZO)then(kp is ZO)(ki is ZO)(kd is ZO)
26.If(E is ZO)and(EC is PS)then(kp is NS)(ki is NS)(kd is NS)
27.If(E is ZO)and(EC is PM)then(kp is PS)(ki is PS)(kd is NS)
28.If(E is ZO)and(EC is PB)then(kp is PM)(ki is PM)(kd is ZO)
29.If(E is PS)and(EC is NB)then(kp is NM)(ki is NM)(kd is ZO)
30.If(E is PS)and(EC is NM)then(kp is PS)(ki is PS)(kd is ZO)
31.If(E is PS)and(EC is NS)then(kp is ZO)(ki is ZO)(kd is NS)
32.If(E is PS)and(EC is ZO)then(kp is NM)(ki is NM)(kd is ZO)
33.If(E is PS)and(EC is PS)then(kp is NS)(ki is NS)(kd is ZO)
34.If(E is PS)and(EC is PM)then(kp is PS)(ki is PS)(kd is ZO)
35.If(E is PS)and(EC is PB)then(kp is PM)(ki is PM)(kd is ZO)
36.If(E is PM)and(EC is NB)then(kp is ZO)(ki is ZO)(kd is PS)
37.If(E is PM)and(EC is NM)then(kp is ZO)(ki is ZO)(kd is NS)
38.If(E is PM)and(EC is NS)then(kp is PS)(ki is PS)(kd is PS)
39.If(E is PM)and(EC is Z)then(kp is PM)(ki is PS)(kd is PS)
40.If(E is PM)and(EC is PS)then(kp is PM)(ki is PM)(kd is PM)
41.If(E is PM)and(EC is PM)then(kp is PM)(ki is PM)(kd is PM)
42.If(E is PM)and(EC is PB)then(kp is PB)(ki is PB)(kd is PB)
43.If(E is PB)and(EC is NB)then(kp is ZO)(ki is ZO)(kd is PB)
44.If(E is PB)and(EC is NM)then(kp is ZO)(ki is ZO)(kd is PB)
45.If(E is PB)and(EC is NS)then(kp is PM)(ki is PM)(kd is PM)
46.If(E is PB)and(EC is ZO)then(kp is PM)(ki is PM)(kd is PM)
47.If(E is PB)and(EC is PS)then(kp is PM)(ki is PM)(kd is PM)
48.If(E is PB)and(EC is PM)then(kp is PB)(ki is PB)(kd is PB)
49.If(E is PB)and(EC is PB)then(kp is PB)(ki is PB)(kd is PB)
其中:PB为极大值,PM为中值,PS为极小值,ZO为零值,NS为负的极小值,NM为负的中值,NB为负的极大值;
3.2)建立控制规则表
所述Kp控制规则表为:
{PB,PB,PM,PM,PS,ZO,ZO},
{PB,PM,PS,NS,NM,ZO,ZO},
{PM,PS,NS,NM,ZO,NS,NS},
{PS,NS,NM,ZO,NS,PS,PM},
{NM,PS,ZO,NM,NS,PS,PM},
{ZO,ZO,PS,PM,PM,PM,PB},
{ZO,ZO,PM,PM,PM,PB,PB};
所述Ki规则表为:
{NB,NB,NM,NS,PS,ZO,ZO},
{NB,NM,NS,NS,PS,ZO,ZO},
{NM,NS,NS,PS,ZO,PS,PS},
{NS,NS,NM,ZO,NS,PS,PM},
{NM,PS,ZO,NM,NS,PS,PM},
{ZO,ZO,PS,PS,PM,PM,PB},
{ZO,ZO,PM,PM,PM,PB,PB};
所述Kd规则表为:
{PM,PM,PS,NB,NM,NS,NS},
{PM,PM,PS,NB,NM,NM,NS},
{ZO,PS,NS,NM,NS,NS,ZO},
{ZO,NS,NS,ZO,NS,NS,ZO},
{ZO,ZO,NS,ZO,ZO,ZO,ZO},
{PS,NS,PS,PS,PM,PM,PB},
{PB,PB,PM,PM,PM,PB,PB};
3.3)利用重心法进行反模糊处理得出Kp,Ki,Kd值。
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